Media type: Electronic Conference Proceeding Title: Progress toward developing high performance immersion compatible materials and processes Contributor: Petrillo, Karen; Patel, Kaushal; Chen, Rex; Li, Wenjie; Kwong, Ranee; Lawson, Peggy; Varanasi, Rao; Robinson, Chris; Holmes, Steven J.; Gil, Dario; Kimmel, Kurt; Slezak, Mark; Dabbagh, Gary; Chiba, Takashi; Shimokawa, Tsutomu imprint: SPIE, 2005 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.601621 ISSN: 0277-786X Origination: Footnote: