Media type: Electronic Conference Proceeding Title: Atomic layer deposition of Al2O3on NF3-pre-treated graphene Contributor: Junige, Marcel; Oddoy, Tim; Yakimova, Rositsa; Darakchieva, Vanya; Wenger, Christian; Lupina, Grzegorz; Kitzmann, Julia; Albert, Matthias; Bartha, Johann W. Published: SPIE, 2015 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2181242 Origination: Footnote: