Media type: Electronic Conference Proceeding Title: Comparison of a simulation model investigating the scanning of surfaces by mechanical profiling systems with current measurements Contributor: Kratz, Frank; Ringel, Gabriele A.; Toebben, Helmut H.; Schmitt, Dirk-Roger Published: SPIE, 1996 Published in: Specification, Production, and Testing of Optical Components and Systems (1996) Extent: Language: Not determined DOI: 10.1117/12.246753 ISSN: 0277-786X Origination: Footnote: