Media type: E-Article Title: Advanced Simulation of Dry Etching Process Technology Contributor: Pelka, J. Published: Trans Tech Publications, Ltd., 1993 Published in: Materials Science Forum, 140-142 (1993), Seite 25-38 Language: Not determined DOI: 10.4028/www.scientific.net/msf.140-142.25 ISSN: 1662-9752 Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science Origination: Footnote: