author = { Campanella, Humberto AND Nouet, Pascal AND Uranga, Arantxa AND de Paco, Pedro AND Barniol, Nuria AND Esteve, Jaume },

title = { Automated on‐wafer extraction of equivalent‐circuit parameters in thin‐film bulk acoustic wave resonators and substrate },

publisher = {Wiley},

isbn = {0895-2477},

isbn = {1098-2760},

keywords = { Electrical and Electronic Engineering , Condensed Matter Physics , Atomic and Molecular Physics, and Optics , Electronic, Optical and Magnetic Materials },

year = {2008},