%0 Generic
%T Automated on‐wafer extraction of equivalent‐circuit parameters in thin‐film bulk acoustic wave resonators and substrate
%A Campanella, Humberto
%A Nouet, Pascal
%A Uranga, Arantxa
%A de Paco, Pedro
%A Barniol, Nuria
%A Esteve, Jaume
%I Wiley
%@ 0895-2477
%@ 1098-2760
%K Electrical and Electronic Engineering
%K Condensed Matter Physics
%K Atomic and Molecular Physics, and Optics
%K Electronic, Optical and Magnetic Materials
%D 2008
%C Wiley
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