TY - GEN
AU - Campanella, Humberto
AU - Nouet, Pascal
AU - Uranga, Arantxa
AU - de Paco, Pedro
AU - Barniol, Nuria
AU - Esteve, Jaume
TI - Automated on‐wafer extraction of equivalent‐circuit parameters in thin‐film bulk acoustic wave resonators and substrate
PB - Wiley
SN - 0895-2477
SN - 1098-2760
KW - Electrical and Electronic Engineering
KW - Condensed Matter Physics
KW - Atomic and Molecular Physics, and Optics
KW - Electronic, Optical and Magnetic Materials
PY - 2008
ER -
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