@misc
{TN_libero_mab2,
author = {
Pelka, J.
},
title = {
Advanced Simulation of Dry Etching Process Technology
},
publisher = {Trans Tech Publications, Ltd.},
isbn = {1662-9752},
keywords = {
Mechanical Engineering
,
Mechanics of Materials
,
Condensed Matter Physics
,
General Materials Science
},
year = {1993},
}