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  1. Hald, Axel [Author] ; Technische Universität Dresden

    Methoden zur Analyse parasitärer elektrostatischer Effekte in mikro-elektromechanischen Systemen - [Als Manuskript gedruckt]

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    Düsseldorf: VDI Verlag GmbH, [2020] ; Dresden: Technische Universität Dresden, Institut für Feinwerktechnik und Elektronik-Design, [2020]

    Published in: Verein Deutscher Ingenieure: Fortschritt-Berichte VDI / 20 ; 473

  2. Wolfram, Heiko [Author] ; Specht, Hendrik [Contributor]; Schmiedel, Ralf [Contributor]; Aurich, Torsten [Contributor]; Dötzel, Wolfram [Contributor]

    Implementation Issues on MEMS - A Study on System Identification

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    Chemnitz : Technische Universität Chemnitz, [2005]

  3. Wolfram, Heiko [Author]

    Model Building, Control Design and Practical Implementation of a High Precision, High Dynamical MEMS Acceleration Sensor

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    Chemnitz : Technische Universität Chemnitz, [2005] ; Chemnitz : Society of Photo-Optical Instrumentation Engineers (SPIE), [2005]

  4. Wibbeler, Jürgen [Author] ; Dötzel, Wolfram [Reviewer]; Hauptmann, Peter [Reviewer]; Werthschützky, Roland [Reviewer] Technische Universität Chemnitz

    Frequenzselektive Vibrationssensoren mit spannungsgesteuerter Resonanzabstimmung in Oberflächenmikromechanik

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    [2003]