• Medientyp: E-Book; Preprint
  • Titel: Implementation Issues on MEMS - A Study on System Identification
  • Beteiligte: Wolfram, Heiko [VerfasserIn]
  • Erschienen: Chemnitz : Technische Universität Chemnitz, [2005]
  • Sprache: Englisch
  • Entstehung:
  • Schlagwörter: Technik ; Mikrospiegel ; Kapazitiver Sensor ; MEMS ; technology ; Identifikation ; Nichtlinearität
  • Beschreibung: A nonlinear identification scheme is provided for a LTI-system with a feedback-nonlinearity, which depends on the input and LTI-system output. This is especially the case for MEMS, where the electrostatic field depends on the displacement and input voltage. The fact, that the algorithm only requires a matrix inversion and singular value decomposition, makes it possible to use the identification scheme for online-estimation. There is also no other a-priori knowledge about the system, except the order, needed.
  • Anmerkungen:
  • Zugangsstatus: Freier Zugang