• Medientyp: E-Artikel
  • Titel: Wafer-scale detachable monocrystalline germanium nanomembranes for the growth of III–V materials and substrate reuse
  • Beteiligte: Paupy, Nicolas; Oulad Elhmaidi, Zakaria; Chapotot, Alexandre; Hanuš, Tadeáš; Arias-Zapata, Javier; Ilahi, Bouraoui; Heintz, Alexandre; Poungoué Mbeunmi, Alex Brice; Arvinte, Roxana; Aziziyan, Mohammad Reza; Daniel, Valentin; Hamon, Gwenaëlle; Chrétien, Jérémie; Zouaghi, Firas; Ayari, Ahmed; Mouchel, Laurie; Henriques, Jonathan; Demoulin, Loïc; Diallo, Thierno Mamoudou; Provost, Philippe-Olivier; Pelletier, Hubert; Volatier, Maïté; Kurstjens, Rufi; Cho, Jinyoun; [...]
  • Erschienen: Royal Society of Chemistry (RSC), 2023
  • Erschienen in: Nanoscale Advances
  • Umfang: 4696-4702
  • Sprache: Englisch
  • DOI: 10.1039/d3na00053b
  • ISSN: 2516-0230
  • Schlagwörter: General Engineering ; General Materials Science ; General Chemistry ; Atomic and Molecular Physics, and Optics ; Bioengineering
  • Zusammenfassung: <jats:p>The Porous germanium Efficient Epitaxial LayEr Release (PEELER) process is introduced allowing the fabrication of wafer scale detachable monocrystalline Ge nanomembranes compatible with III–V material growth on porous Ge and substrate reuse.</jats:p>
  • Beschreibung: <jats:p>The Porous germanium Efficient Epitaxial LayEr Release (PEELER) process is introduced allowing the fabrication of wafer scale detachable monocrystalline Ge nanomembranes compatible with III–V material growth on porous Ge and substrate reuse.</jats:p>
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  • Zugangsstatus: Freier Zugang