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  3. Franke, Eva; Schubert, Mathias; Neumann, Horst; Tiwald, Thomas E.; Thompson, Daniel W.; Woollam, John A.; Hahn, Jens; Richter, Frank

    Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range

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    AIP Publishing, 1997

    Published in: Journal of Applied Physics, 82 (1997) 6, Seite 2906-2911