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  1. Schwizer, Jürg [Author]; Mayer, Michael [Author]; Brand, Oliver [Author]

    Force sensors for microelectronic packaging applications

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    Berlin; Heidelberg [u.a.]: Springer, 2005

    Published in: Microtechnology and MEMS

  2. Beeby, Stephen [Other]

    MEMS mechanical sensors

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    Boston, Mass. [u.a.]: Artech House, 2004

    Published in: Artech House microelectromechanical systems (MEMS) series