Skip to contents Teuber, Silvio [Other] Wechselwirkung von Metall-clustern mit intensiven fs-Laserspulen Electronic Resources Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. 2003 Hollein, Ingo; Teuber, Silvio; Bubke, Karsten Determination of mask induced polarization effects on AltPSM mask structures Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2005 Published in: SPIE Proceedings (2005) Erdmann, Andreas; Graf, Thomas; Bubke, Karsten; Höllein, Ingo; Teuber, Silvio Mask defect printing mechanisms for future lithography generations Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2006 Published in: SPIE Proceedings (2006) Cotte, Eric; Selle, Michael; Bubke, Karsten; Teuber, Silvio Study of stress birefringence for 193-nm immersion photomasks Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2005 Published in: SPIE Proceedings (2005) Cotte, Eric; Alles, Benjamin; Wandel, Timo; Antesberger, Gunter; Teuber, Silvio; Vorwerk, Manuel; Frangen, Andreas; Katzwinkel, Frank 193-nm immersion photomask image placement in exposure tools Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2006 Published in: SPIE Proceedings (2006) Teuber, Silvio; Duerr, Arndt C.; Herguth, Holger; Kunkel, Gerhard; Wandel, Timo; Zell, Thomas Influence of mask manufacturing process on printing behavior of angled line structures Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2006 Published in: SPIE Proceedings (2006) Yang, Minghong; Leiterer, Jork; Gatto, Alexandre; Kaiser, Norbert; Höllein, Ingo; Teuber, Silvio; Bubke, Karsten VUV spectrophotometry for photomasks characterization at 193 nm Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2005 Published in: SPIE Proceedings (2005) Teuber, Silvio; Higashikawa, Iwao; Urbach, Jan-Peter; Schilz, Christof M.; Koehle, Roderick; Zibold, Axel M. First results from AIMS beta tool for 157-nm lithography Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2004 Published in: SPIE Proceedings (2004) Cotte, Eric P.; Haessler, Ruediger; Utess, Benno; Antesberger, Gunter; Kromer, Frank; Teuber, Silvio Pellicle choice for 193-nm immersion lithography photomasks Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2004 Published in: SPIE Proceedings (2004) Yasui, Takashi; Higashikawa, Iwao; Kuschnerus, Peter; Degel, Wolfgang; Boehm, Klaus; Zibold, Axel M.; Kobiyama, Yuji; Urbach, Jan-Peter; Schilz, Christof M.; Teuber Semmler, Silvio Actinic aerial image measurement for qualification of defect on 157-nm photomask Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2004 Published in: SPIE Proceedings (2004)
Teuber, Silvio [Other] Wechselwirkung von Metall-clustern mit intensiven fs-Laserspulen Electronic Resources Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. 2003
Hollein, Ingo; Teuber, Silvio; Bubke, Karsten Determination of mask induced polarization effects on AltPSM mask structures Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2005 Published in: SPIE Proceedings (2005)
Erdmann, Andreas; Graf, Thomas; Bubke, Karsten; Höllein, Ingo; Teuber, Silvio Mask defect printing mechanisms for future lithography generations Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2006 Published in: SPIE Proceedings (2006)
Cotte, Eric; Selle, Michael; Bubke, Karsten; Teuber, Silvio Study of stress birefringence for 193-nm immersion photomasks Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2005 Published in: SPIE Proceedings (2005)
Cotte, Eric; Alles, Benjamin; Wandel, Timo; Antesberger, Gunter; Teuber, Silvio; Vorwerk, Manuel; Frangen, Andreas; Katzwinkel, Frank 193-nm immersion photomask image placement in exposure tools Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2006 Published in: SPIE Proceedings (2006)
Teuber, Silvio; Duerr, Arndt C.; Herguth, Holger; Kunkel, Gerhard; Wandel, Timo; Zell, Thomas Influence of mask manufacturing process on printing behavior of angled line structures Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2006 Published in: SPIE Proceedings (2006)
Yang, Minghong; Leiterer, Jork; Gatto, Alexandre; Kaiser, Norbert; Höllein, Ingo; Teuber, Silvio; Bubke, Karsten VUV spectrophotometry for photomasks characterization at 193 nm Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2005 Published in: SPIE Proceedings (2005)
Teuber, Silvio; Higashikawa, Iwao; Urbach, Jan-Peter; Schilz, Christof M.; Koehle, Roderick; Zibold, Axel M. First results from AIMS beta tool for 157-nm lithography Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2004 Published in: SPIE Proceedings (2004)
Cotte, Eric P.; Haessler, Ruediger; Utess, Benno; Antesberger, Gunter; Kromer, Frank; Teuber, Silvio Pellicle choice for 193-nm immersion lithography photomasks Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2004 Published in: SPIE Proceedings (2004)
Yasui, Takashi; Higashikawa, Iwao; Kuschnerus, Peter; Degel, Wolfgang; Boehm, Klaus; Zibold, Axel M.; Kobiyama, Yuji; Urbach, Jan-Peter; Schilz, Christof M.; Teuber Semmler, Silvio Actinic aerial image measurement for qualification of defect on 157-nm photomask Conference Proceedings View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. SPIE, 2004 Published in: SPIE Proceedings (2004)
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> Creator Skip to next facet Teuber, Silvio (9) Wert ausschließen Bubke, Karsten (4) Wert ausschließen Antesberger, Gunter (2) Wert ausschließen Cotte, Eric (2) Wert ausschließen Higashikawa, Iwao (2) Wert ausschließen Höllein, Ingo (2) Wert ausschließen Schilz, Christof M. (2) Wert ausschließen Urbach, Jan-Peter (2) Wert ausschließen Wandel, Timo (2) Wert ausschließen Zibold, Axel M. (2) Wert ausschließen Alles, Benjamin (1) Wert ausschließen Boehm, Klaus (1) Wert ausschließen Cotte, Eric P. (1) Wert ausschließen Degel, Wolfgang (1) Wert ausschließen Duerr, Arndt C. (1) Wert ausschließen Erdmann, Andreas (1) Wert ausschließen Frangen, Andreas (1) Wert ausschließen Gatto, Alexandre (1) Wert ausschließen Graf, Thomas (1) Wert ausschließen Haessler, Ruediger (1) Wert ausschließen Herguth, Holger (1) Wert ausschließen Hollein, Ingo (1) Wert ausschließen Kaiser, Norbert (1) Wert ausschließen Katzwinkel, Frank (1) Wert ausschließen Kobiyama, Yuji (1) Wert ausschließen Koehle, Roderick (1) Wert ausschließen Kromer, Frank (1) Wert ausschließen Kunkel, Gerhard (1) Wert ausschließen Kuschnerus, Peter (1) Wert ausschließen Leiterer, Jork (1) Wert ausschließen Selle, Michael (1) Wert ausschließen Teuber Semmler, Silvio (1) Wert ausschließen Utess, Benno (1) Wert ausschließen Vorwerk, Manuel (1) Wert ausschließen Yang, Minghong (1) Wert ausschließen Yasui, Takashi (1) Wert ausschließen Zell, Thomas (1) Wert ausschließen Show more show less
> Collection Skip to next facet SPIE (CrossRef) (9) Wert ausschließen Verbunddaten SWB (1) Wert ausschließen Show more show less