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  1. Kleefeldt, Klaus [Author]; Dammel, F. [Author]; Gabel, Klaus [Author]; Jordan, Thomas [Author]; Schmuck, I. [Author]

    Safety and environmental impact of the dual coolant blanket concept : (SEAL subtask 6.2., final report)

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    Karlsruhe: KIT-Bibliothek, [2017]

    Published in: Forschungszentrum Karlsruhe: Wissenschaftliche Berichte des Forschungszentrums Karlsruhe ; 5764

  2. Schuetter, S.; Shedd, T.; Nellis, G.; Romano, A.; Dammel, R.; Padmanaban, M.; Houlihan, F.; Krawicz, A.; Lin, G.; Rahman, D.; Chakrapani, S.; Neisser, M.; Van Peski, C.

    Effect of resist surface characteristics on film-pulling velocity in immersion lithography

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    American Vacuum Society, 2006

    Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 24 (2006) 6, Seite 2798-2802

  3. Houlihan, Francis M.; Sakamuri, Raj; Romano, Andrew R.; Dammel, Ralph R.; Conley, Will; Rich, Georgia K.; Miller, Daniel; Rhodes, Larry F.; McDaniels, Joseph M.; Chang, Chun

    Baking study of fluorinated 157-nm resist

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    SPIE, 2003

    Published in: SPIE Proceedings, 5039 (2003), Seite 641

  4. Abdallah, D. J.; McKenzie, D.; Timko, A.; Dioses, A.; Houlihan, F.; Rahman, D.; Miyazaki, S.; Zhang, R.; Kim, W.; Wu, H.; Pylneva, L.; Lu, P.-H.; Neisser, M.; Dammel, R. R.; Biafore, J. J.

    Spin-on tri-layer approaches to high NA 193-nm lithography

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    SPIE, 2007

    Published in: SPIE Proceedings, 6519 (2007), Seite 65190M