• Media type: Electronic Conference Proceeding
  • Title: Cycloolefin/cyanoacrylate (COCA) copolymers for 193-nm and 157-nm lithography
  • Contributor: Dammel, Ralph R.; Sakamuri, Raj; Lee, Sang-Ho; Rahman, Dalil; Kudo, Takanori; Romano, Andrew R.; Rhodes, Larry F.; Lipian, John-Henry; Hacker, Cheryl; Barnes, Dennis A.
  • Published: SPIE, 2002
  • Published in: SPIE Proceedings, 4690 (2002), Seite 101
  • Extent: 101
  • Language: Without Specification
  • DOI: 10.1117/12.474196
  • ISSN: 0277-786X
  • Origination:
  • Footnote: