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  1. Guo, Tong [Other]; Li, Dachao [Other]; Hu, Chunguang [Other]; Hu, Xiaodong [Other]; Chen, Jinping [Other]; Fu, Xing [Other]; Hu, Xiaotang [Other]

    Micro-motion analyzer to study dynamic behavior of MEMS

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    2005 ; 2011

    Published in: Maschinenbau von Makro bis Nano ; 2005, [04.P.02], insges. 2 S.