Media type: E-Article Title: Micro-motion analyzer to study dynamic behavior of MEMS Contributor: Guo, Tong [Other]; Li, Dachao [Other]; Hu, Chunguang [Other]; Hu, Xiaodong [Other]; Chen, Jinping [Other]; Fu, Xing [Other]; Hu, Xiaotang [Other] imprint: 2005 2011 Published in: Maschinenbau von Makro bis Nano ; 2005, [04.P.02], insges. 2 S. Language: English Origination: Footnote: Access State: Open Access