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  1. Kawahara, Takaaki; Yamamuka, Mikio; Makita, Tetsuro; Naka, Jiro; Yuuki, Akimasa; Noboru Mikami, Noboru Mikami; Kouichi Ono, Kouichi Ono

    Step Coverage and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)2

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    IOP Publishing, 1994

    Published in: Japanese Journal of Applied Physics, 33 (1994) 9S, Seite 5129