Media type: E-Article Title: Liquid source chemical vapor deposition of high-dielectric-constant (Ba, Sr)TiO3 films Contributor: Kawahara, Takaaki; Yamamuka, Mikio; Yuuki, Akimasa; Ono, Kouichi Published: Wiley, 1998 Published in: Electrical Engineering in Japan, 125 (1998) 1, Seite 47-54 Language: English DOI: 10.1002/(sici)1520-6416(199810)125:1<47::aid-eej6>3.0.co;2-j ISSN: 0424-7760; 1520-6416 Keywords: Electrical and Electronic Engineering ; Energy Engineering and Power Technology Origination: Footnote: