Skip to contents Kronholz, Stephan [Author] Integration von Nanostrukturen durch alternative Methoden : Mizellen-Deposition, Template-Wachstum und Nanogaps Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Jülich: Forschungszentrum GmbH, Zentralbibliothek, 2007 Published in: Forschungszentrum Jülich: Schriften des Forschungszentrums Jülich / Reihe Informationstechnik ; 15 Kronholz, Stephan [Author] Integration von Nanostrukturen durch alternative Methoden: Mizellen-Deposition, Template-Wachstum und Nanogaps Thesis View online Schließen > Links https://juser.fz-juelich.de/record/56950 Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, 2007 Published in: Jülich : Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, Schriften des Forschungszentrums Jülich. Reihe Informationstechnologie / Information Technology 15, IX, 164 S. (2007). = RWTH Aachen, Diss., 2007 Reichel, Carsten; Kronholz, Stephan; Kammler, Thorsten; Zeun, Annekathrin; Beernink, Gunda Control of topography and morphology for channel SiGe by in-situ HCl etching for future CMOS technologies with high-K metal gate Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2011 Published in: Solid-State Electronics Reichel, Carsten; Schoenekess, Joerg; Kronholz, Stephan; Beernink, Gunda; Zeun, Annekathrin; Dietel, Andreas; Kammler, Thorsten SiGe channels for VT control of high-k metal gate transistors for 32nm complementary metal oxide semiconductor technology and beyond Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2012 Published in: Thin Solid Films Kronholz, Stephan; Karthäuser, Silvia; Hart, A.van der; Wandlowski, T.; Waser, Rainer Metallic nanogaps with access windows for liquid based systems Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2006 Published in: Microelectronics Journal Naumann, Andreas; Kronholz, Stephan; Mowry, Anthony; Ostermay, Ina; Bierstedt, Helmut; Trui, Bernhard; Dittmar, Kornelia; Kücher, Peter; Bartha, Johann W.; Kammler, Thorsten Novel enhanced stressors with graded encapsulated SiGe embedded in the source and drain areas Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2008 Published in: Materials Science and Engineering: B
Kronholz, Stephan [Author] Integration von Nanostrukturen durch alternative Methoden : Mizellen-Deposition, Template-Wachstum und Nanogaps Books Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Jülich: Forschungszentrum GmbH, Zentralbibliothek, 2007 Published in: Forschungszentrum Jülich: Schriften des Forschungszentrums Jülich / Reihe Informationstechnik ; 15
Kronholz, Stephan [Author] Integration von Nanostrukturen durch alternative Methoden: Mizellen-Deposition, Template-Wachstum und Nanogaps Thesis View online Schließen > Links https://juser.fz-juelich.de/record/56950 Show more show less Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, 2007 Published in: Jülich : Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, Schriften des Forschungszentrums Jülich. Reihe Informationstechnologie / Information Technology 15, IX, 164 S. (2007). = RWTH Aachen, Diss., 2007
Reichel, Carsten; Kronholz, Stephan; Kammler, Thorsten; Zeun, Annekathrin; Beernink, Gunda Control of topography and morphology for channel SiGe by in-situ HCl etching for future CMOS technologies with high-K metal gate Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2011 Published in: Solid-State Electronics
Reichel, Carsten; Schoenekess, Joerg; Kronholz, Stephan; Beernink, Gunda; Zeun, Annekathrin; Dietel, Andreas; Kammler, Thorsten SiGe channels for VT control of high-k metal gate transistors for 32nm complementary metal oxide semiconductor technology and beyond Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2012 Published in: Thin Solid Films
Kronholz, Stephan; Karthäuser, Silvia; Hart, A.van der; Wandlowski, T.; Waser, Rainer Metallic nanogaps with access windows for liquid based systems Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2006 Published in: Microelectronics Journal
Naumann, Andreas; Kronholz, Stephan; Mowry, Anthony; Ostermay, Ina; Bierstedt, Helmut; Trui, Bernhard; Dittmar, Kornelia; Kücher, Peter; Bartha, Johann W.; Kammler, Thorsten Novel enhanced stressors with graded encapsulated SiGe embedded in the source and drain areas Articles View online Schließen > Access Close > Bookmarks You can manage bookmarks using lists, please log in to your user account for this. Elsevier BV, 2008 Published in: Materials Science and Engineering: B
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