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  1. Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Zeitner, Uwe; Leitel, Robert; Eckstein, Hans-Christoph; Schleicher, Philipp; Schröder, Sven; Trost, Marcus; Risse, Stefan; Steinkopf, Ralf; Scholze, Frank; Laubis, Christian

    Sub-aperture EUV collector with dual-wavelength spectral purity filter

    Conference Proceedings
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    SPIE, 2015

    Published in: SPIE Proceedings