Media type: Electronic Conference Proceeding Title: Sub-aperture EUV collector with dual-wavelength spectral purity filter Contributor: Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Zeitner, Uwe; Leitel, Robert; Eckstein, Hans-Christoph; Schleicher, Philipp; Schröder, Sven; Trost, Marcus; Risse, Stefan; Steinkopf, Ralf; Scholze, Frank; Laubis, Christian imprint: SPIE, 2015 Published in: SPIE Proceedings Extent: Language: Not determined DOI: 10.1117/12.2175666 ISSN: 0277-786X Origination: Footnote: