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  1. Büttgenbach, Stephanus [Editor]; Burisch, Arne [Editor]; Hesselbach, Jürgen [Editor] ; Sonderforschungsbereich Konstruktion und Fertigung Aktiver Mikrosysteme Braunschweig

    Design and manufacturing of active microsystems

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    Berlin; Heidelberg [u.a.]: Springer, 2011

    Published in: Microtechnology and MEMS

  2. Jackson, Mark J. [Author]

    Micro and nanomanufacturing

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    New York, NY: Springer, 2007

  3. Ehrfeld, Wolfgang [Editor]; Bähr, Jochen [Other]

    Handbuch Mikrotechnik

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    München [u.a.]: Hanser, 2002

  4. Senturia, Stephen D. [Author]

    Microsystem design

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    Boston, Mass. [u.a.]: Kluwer Acad. Publ., c2001