Media type: Book Title: Design and manufacturing of active microsystems Contributor: Büttgenbach, Stephanus [Editor]; Burisch, Arne [Editor]; Hesselbach, Jürgen [Editor] Corporation: Sonderforschungsbereich Konstruktion und Fertigung Aktiver Mikrosysteme Published: Berlin; Heidelberg [u.a.]: Springer, 2011 Published in: Microtechnology and MEMS Extent: XII, 444 S.; Ill., graph. Darst; 235 mm x 155 mm Language: English ISBN: 9783642129025 Publisher, production or purchase order numbers: Sonstige Nummer: 12698608 RVK notation: ZN 3750 : Mikrosystemtechnik Keywords: Mikrosystemtechnik > Systementwicklung > Mikrofertigung Origination: Footnote: This book summarizes the results obtained within the Collaborative Research Center (SFB 516)
Departmental Library DrePunct – open access area Shelf-mark: ZN 3750 B928 D4 Item ID: 32990475 Status: Loanable