Media type: Book Title: Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) Contributor: McGuire, Gary E. [Other]; MacGuire, Gary E. [Hrsg.] imprint: Park Ridge, NJ: Noyes Publ., 1988 Published in: Materials science and progress technology series Extent: XIII, 675 S.; Ill., graph. Darst Language: English ISBN: 0815511507 RVK notation: ZN 3460 : Halbleiterwerkstoffe Keywords: VLSI > Halbleiterwerkstoff > ULSI > Integrierte Schaltung Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 3460 M148 S4 Item ID: 10067988 Status: Loanable
Departmental Library DrePunct – stack Shelf-mark: 0992 01701 001 Item ID: 10087944 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order