Media type: Book; Conference Proceedings Title: Advanced metallizations in microelectronics : symposium held April 16 - 20, 1990, San Francisco, California, U.S.A Contributor: Katz, Avishay [Hrsg.] imprint: Pittsburgh, Pa.: Materials Research Society, 1990 Published in: Materials Research Society: Materials Research Society symposium proceedings ; 18100 Extent: XV, 633 S; Ill., graph. Darst Language: English ISBN: 1558990704 RVK notation: ZN 4900 : Allgemeines Keywords: CVD-Verfahren Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: UD 8400-181 Item ID: 30527715 Status: Loanable