Media type: Book Title: Plasmatechnik : Anwendung in der Elektronik Contributor: Schade, Klaus [Author]; Suchaneck, Gunnar [Author]; Tiller, Hans-Jürgen [Author] imprint: Berlin: Verl. Technik, 1990 Issue: 1. Aufl. Extent: 196 S; Ill., graph. Darst Language: German ISBN: 3341008349 RVK notation: ZN 4100 : Allgemeines UR 8000 : Plasmaphysik allgemein Keywords: Plasmatechnik > Oberflächenbehandlung Origination: Footnote: Literaturverz. S. 184 - 194
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