Media type: Book Title: Thin films from free atoms and particles Contributor: Klabunde, Kenneth J. [Hrsg.] imprint: Orlando, Fla. [u.a.]: Acad. Press, 1985 Extent: XII, 363 S; Ill., graph. Darst Language: English ISBN: 0124107559; 0124107567 RVK notation: UP 7500 : Allgemeines Keywords: Dünnschichttechnik Dünne Schicht Origination: Footnote: Includes bibliographical references and index