Media type: Book Title: Ion beam modifications of insulators Contributor: Mazzoldi, Paolo [Hrsg.] imprint: Amsterdam [u.a.]: Elsevier, 1987 Published in: Beam modification of materials ; 2 Extent: XXV, 740 S.; Ill., graph. Darst Language: English ISBN: 044442816X RVK notation: UP 9350 : Ionenimplantation allgemein, Etching, Sputtering Keywords: Electric insulators and insulation ; Ion bombardment Origination: Footnote: Literaturangaben