Media type: Book Title: Glow discharge processes : sputtering and plasma etching Contributor: Chapman, Brian [Author]; Chapman, Brian N. [Author] imprint: New York, NY [u.a.]: Wiley, 1980 Published in: A Wiley interscience publication Extent: XV, 406 S; graph. Darst Language: English ISBN: 9780471078289; 047107828X RVK notation: ZN 4150 : Dünnschichttechnologie ZN 3400 : Allgemeines UR 8000 : Plasmaphysik allgemein UR 6000 : Elektrische und Ionisationsphänomene in Gasen Keywords: Glimmentladung > Sputtern > Plasmaätzen Origination: Footnote: Literaturverz. S. 397 - 400
Departmental Library DrePunct – open access area Shelf-mark: ZN 4150 C466 Item ID: 10365051 Status: Loanable