Media type: E-Article Title: Development of an integrated guiding and actuation element for high dynamic nanopositioning systems Contributor: Gorges, Stephan [Author]; Leistritz, Bianca [Author]; Hesse, Steffen [Author]; Ortlepp, Ingo [Author]; Slotta, Georg [Author]; Schäffel, Christoph [Author] Published: [2017] Published in: Ilmenau Scientific Colloquium Engineering for a Changing World (2017 : Ilmenau): Engineering for a changing world ; 2017 Language: English Identifier: Origination: Footnote: Access State: Open Access