Media type: Electronic Journal Title: Nanomanufacturing and metrology imprint: [Singapore]: Springer Singapore, [2017]- Publication information: November 2017- Language: English ISSN: 2520-8128 Keywords: Zeitschrift Origination: Footnote: In SLUB collection 2018 - 1.2018,1 - 2.2019,4 3.2020,1 - 5.2022,4 Access State: Open Access