Media type: E-Book; Conference Proceedings Title: Modeling Aspects in Optical Metrology VI : 26-28 June 2017, Munich, Germany Contributor: Bodermann, Bernd [HerausgeberIn]; Frenner, Karsten [HerausgeberIn]; Silver, Richard M. [HerausgeberIn] Corporation: SPIE ; European Optical Society ; Wissenschaftliche Gesellschaft Lasertechnik imprint: Bellingham, Washington, USA: SPIE, [2017] Published in: SPIE: Proceedings of SPIE ; 10330 Extent: 1 Online-Ressource; Illustrationen Language: English ISBN: 9781510611061 Keywords: Optische Messtechnik > Metrologie > Modellierung Origination: Footnote: "The Conference Modeling Aspects in Optical Metrology VI is organised as part of SPIE Optical Metrology Symposium, which is co-located with World of Photonics Congress 2017 in Munich, Germany." - Vorwort Literaturangaben