Media type: E-Book; Conference Proceedings Title: 33rd European Mask and Lithography Conference : 26-28 June 2017, Dresden, Germany Contributor: Behringer, Uwe [Editor]; Finders, Jo [Editor] Corporation: Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik ; SPIE Published: Bellingham, Washington, USA: SPIE, [2017] Published in: SPIE: Proceedings of SPIE ; 10446 Extent: 1 Online-Ressource; Illustrationen Language: English ISBN: 9781510613577 Keywords: Maske > Lithografie Origination: Footnote: Literaturangaben