Media type: Book Title: Sputtering by particle bombardment / ed. by R. Behrisch 1, Physical sputtering of single-element solids / with contrib. by H. H. Andersen ... Contributor: Andersen, Hans Henrik [Other] imprint: Berlin; Heidelberg: Springer, 1981 Published in: Sputtering by particle bombardment / ed. by R. Behrisch ; 1 Topics in applied physics ; 47 Extent: X, 281 S.; graph. Darst Language: English ISBN: 3540105212; 0387105212 RVK notation: UP 9350 : Ionenimplantation allgemein, Etching, Sputtering UD 9450 : Topics in applied physics Origination: Footnote: