Media type: Book; Thesis Title: Trockenätzen von Niobschichten mit CF4O2- und @SF6O2-Plasmen Other titles: Abweichender Titel: Trockenätzen von Niobschichten mit CFO- und SFO-Plasmen Contributor: Fromknecht, Rainer [Author] imprint: 1988 Extent: IV, 205 S.; Ill., graph. Darst Language: German Keywords: Josephson-Kontakt > Niob > Trockenätzen Origination: University thesis: Karlsruhe, Univ., Diss., 1988 Footnote:
Departmental Library DrePunct – stack Shelf-mark: 0990 00183 001 Item ID: 31271292 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order
Departmental Library DrePunct – stack Shelf-mark: 0990 00884 001 Item ID: 32269757 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order