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Sputtering by particle bombardment / 3, Characteristics of sputtered particles, technical applications / with contrib. by R. Behrisch

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Media type: Book
Title: Sputtering by particle bombardment / ed. by R. Behrisch
3, Characteristics of sputtered particles, technical applications / with contrib. by R. Behrisch ...
imprint: Berlin; Heidelberg [u.a.]: Springer, 1991
Published in: Sputtering by particle bombardment / ed. by R. Behrisch ; 3
Topics in applied physics ; 64
Extent: XIII, 410 S.; Ill., graph. Darst
Language: English
ISBN: 3540534288; 0387534288
RVK notation: UP 9350 : Ionenimplantation allgemein, Etching, Sputtering
UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik
UD 9450 : Topics in applied physics
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