Media type: Book; Thesis Title: Fundamental aspects of reactions in titanium-silicon thin films for integrated circuits Contributor: Raaijmakers, Ivo J. [Author] imprint: 1988 Extent: X, 141 S.; Ill., graph. Darst Language: English Keywords: Silicium > Titan > Dünnschichtschaltung Origination: University thesis: Eindhoven, Techn. Univ., Diss., 1988 Footnote:
Departmental Library DrePunct – stack Shelf-mark: 0990 00134 001 Item ID: 32580658 Status: Loanable, place order > Ordering possible ‒ please log in