Die Randschichtausbreitung bei der Plasma-Immersions-Ionenimplantation

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Media type: Book; Thesis
Title: Die Randschichtausbreitung bei der Plasma-Immersions-Ionenimplantation
Contributor: Mändl, Stephan [Author]
imprint: Rossendorf: Forschungszentrum Rossendorf, 1998
Published in: Forschungszentrum Rossendorf: FZR ; 206
Extent: 101 S.; Ill., graph. Darst
Language: German
RVK notation: UP 7550 : Herstellung dünner Schichten incl. Epitaxie-Schichten, Dünnschichttechnik
Keywords: Forschungsbericht ; Hochschulschrift
Origination:
University thesis: Zugl.: Dresden, Techn. Univ., Diss., 1997
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Status: To be used in the library, no dispatch by interlibrary loan; delivery of photocopies possible

Status: Place order for use in library, no dispatch by interlibrary loan; delivery of photocopies possible