> Details

Campbell, S. A. [Editor]

Semiconductor micromachining

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  • Media type: Book
  • Title: Semiconductor micromachining
  • Contributor: Campbell, S. A. [Hrsg.]
  • imprint: Chichester; Weinheim [u.a.]: Wiley, 19XX-
  • Language: English
  • ISBN: 0471980846
  • RVK notation: UP 2800 : Allgemeines
  • Keywords: Halbleitertechnologie > Mikromechanik
  • Origination:
  • Footnote:

> Multivolume work