Media type: Book; Thesis Title: Die Rolle der Halbleitertechnik für die Mikroproduktionstechnik Contributor: Banse, Klaus-Dieter [Author] imprint: 1997 Extent: 170 S.; Ill., graph. Darst Language: German RVK notation: ZN 4100 : Allgemeines Keywords: Mikromechanik > Mikroelektronik Origination: University thesis: Berlin, Techn. Univ., Diss., 1998 Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4100 B219 Item ID: 10364516 Status: Loanable