Media type: Book; Thesis Title: Herstellung und Charakterisierung von Diffusionsbarrieren auf Ta-Basis für die Cu-Mehrebenenmetallisierung von ULSI-Halbleiterbauelementen Contributor: Stavrev, Momtchil [Author] Published: 1998 Extent: VI, 155 S.; Ill., graph. Darst Language: German RVK notation: ZN 4150 : Dünnschichttechnologie Keywords: Hochschulschrift Origination: University thesis: Dresden, Techn. Univ., Diss., 1998 Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4150 S798 Item ID: 10364786 Status: To be used in the library, interlibrary loan possible
Central Library – stack Shelf-mark: 1999 4 024304 001 Item ID: 30033205 Status: Loanable, place order > Ordering possible ‒ please log in Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.