Media type: Book Title: Handbook of semiconductor technology / Kenneth A. Jackson ... (eds.) 2, Processing of semiconductors imprint: Weinheim: Wiley-VCH, 2000 Published in: Handbook of semiconductor technology / Kenneth A. Jackson ... (eds.) ; 2 2000 Language: English ISBN: 3527298355 RVK notation: UP 2800 : Allgemeines Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: UP 2800 J13-2 Item ID: 10087741 Status: Loanable