Media type: Book; Thesis Title: Prozeßverbesserung in der Produktentwicklung durch innovative Organisationsgestaltung und adäquate Technikunterstützung Contributor: Hirsch, Annette [Author] imprint: 2000 Extent: 152 S.; graph. Darst Language: German Keywords: In situ > FT-IR-Spektroskopie > Methylchlorsilane > Pyrolyse Methylchlorsilane > Gasphase > Pyrolyse Methylchlorsilane > Siliciumcarbid > CVD-Verfahren Trichlorsilan Origination: University thesis: Dresden, Techn. Univ., Diss., 2000 Footnote:
Central Library – stack Shelf-mark: 2000 8 017573 001 Item ID: XMOM1560269 Status: Loanable, place order > Ordering possible ‒ please log in Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.