Media type: Book Title: Handbook of thin film materials / ed. by Hari Singh Nalwa 1, Deposition and processing of thin films imprint: San Diego: Academic Press, 2002 Published in: Handbook of thin film materials / ed. by Hari Singh Nalwa ; 1 Extent: XXVI, 706 S.; Ill., graph. Darst Language: English ISBN: 0125129092 RVK notation: ZN 4150 : Dünnschichttechnologie Keywords: Dünnschichttechnik > Werkstoff > Abscheidung Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4150 N173-1 Item ID: 30626761 Status: Loanable