Media type: Book; Thesis Title: Optische Strukturierung ultradünner funktioneller Polymerfilme Contributor: Trogisch, Sven [Author] Published: 2003 Extent: IV, 131 S.; Ill., graph. Darst Language: German RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Polymerfilm > Diazosulfonate > Fotolithografie Origination: University thesis: Dresden, Techn. Univ., Diss., 2003 Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 T844 Item ID: 30908590 Status: Loanable
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 T844 Item ID: 30908589 Status: To be used in the library, interlibrary loan possible
Central Library – stack Shelf-mark: 2002 8 035534 Item ID: 30908588 Status: Loanable, place order > Ordering possible ‒ please log in Orders received from Mon - Fri by 1 pm are expected to be ready for you on the same day.