Media type: Book Title: LPCVD silicon nitride and oxynitride films : material and applications in integrated circuit technology Contributor: Habraken, Frans H. P. M. [Editor] Published: Berlin; Heidelberg; New York; London; Paris; Tokyo; Hong Kong; Barcelona; Budapest: Springer, 1991 Published in: Research reports ESPRIT / 369 ; 1 Extent: X, 159 S.; graph. Darst; 25 cm Language: English ISBN: 3540539549; 0387539549 RVK notation: ZN 3400 : Allgemeines UP 7500 : Allgemeines Keywords: Siliciumoxinitride > LPCVD-Verfahren > Integrierte Schaltung Origination: Footnote: Literaturangaben
Departmental Library DrePunct – open access area Shelf-mark: ZN 3400 H116 Item ID: 31271009 Status: Loanable
Departmental Library DrePunct – stack Shelf-mark: 93 8 07497 002 Item ID: 30527749 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order