Media type: Book Title: Handbook of multilevel metallization for integrated circuits : materials, technology, and applications Contributor: Wilson, Syd R. [Hrsg.]; Tracy, Clarence J. [Other]; Freeman, John L. [Other] imprint: Park Ridge, NJ: Noyes, 1993 Published in: Materials science and process technology series ; electronic materials and process technology Extent: XXIII, 887 S; Ill., graph. Darst Language: English ISBN: 0815513402 RVK notation: ZN 4150 : Dünnschichttechnologie Keywords: Halbleitertechnologie > Mehrschichtsystem > Metallisieren Origination: Footnote: Literaturangaben
Departmental Library DrePunct – stack Shelf-mark: 95 8 88213 001 Item ID: 10068858 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order
Departmental Library DrePunct – stack Shelf-mark: R2019 8 2633 Item ID: 10085476 Status: Loanable, place order > Ordering possible ‒ please log in Delivery expected: 1 - 2 days after order