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Plasma technology

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Media type: Serial; Monograph Series
Title: Plasma technology
Published: Amsterdam [u.a.]: Elsevier, 1985-
Publication information: 1.1985 -
Language: Not determined
ISBN: 0444424695
Keywords: Monografische Reihe
Origination:
Footnote:

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This is the bibliographic rereference for a superordinate order. SLUB holdings see "Multivolume Work" or "Publishers' Series"

> Publishers' series

Biederman, Hynek [Author]; Osada, Yoshihito [Author]
Plasma polymerization processes Hynek Biederman; Yoshihito Osada
Amsterdam [u.a.]: Elsevier, 1992

DuVal, Pierre [Author]
High vacuum production in the microelectronics industry Pierre Duval
Amsterdam [u.a.]: Elsevier, 1988

Morgan, Russ A. [Author]
Plasma etching in semiconductor fabrication
Amsterdam [u.a.]: Elsevier, 1985